Light-Diode Holoellipsometer with Binary Modulation of Polarization Employing Light Scattering from Uniaxial Bi-Dimension Crystal

M Ali; Али Мохаммед; A P Kiryanov; Кирьянов Анатолий Павлович; V I Kovalev; Ковалёв Виталий Иванович; I V Kvasha; Кваша Ирина Викторовна

Light-Diode Holoellipsometer with Binary Modulation of Polarization Employing Light Scattering from Uniaxial Bi-Dimension Crystal

Authors: Ali M¹, Kiryanov AP², Kovalev VI³, Kvasha IV⁴
Affiliations:
1. Bauman Moscow State Technical University
2. Scientific and Technological Center for Unique Instrumentation of RAS
3. Department of the Kotelnikov Institute of Electronics and Radiotechniques of RAS
4. People‘s Friendship University of Russia
Issue: No 2 (2013)
Pages: 201-209
Section: Articles
URL: https://journals.rudn.ru/miph/article/view/8544

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Abstract

A holoellipsometer with binary modulation of polarization employing almost normal light scattering by the sample representing itself an optically uniaxial crystal is presented. The device is actual for the tomometric tools which are widely used in nanotechnologies and medicine. The main equations of the holoellipsometry employing normal light scattering method are obtained.