Interference Holoellipsometry "in situ" of a Transparent Two-Dimensional Uniaxial Crystal at Normal Angle Laser Radiation Reflection

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Abstract

The following issues are considered in the paper: a) method of the in situ interference holoellipsometry (ellipsometry with the complete set of measured parameters: modules and phases of complex amplitude reflection coefficients for linear p- and s-polarizations) of a transparent two-dimensional uniaxial crystal at normal reflection angle of the laser radiation under the condition that the crystal optical axis belongs to the reflecting surface; b) schematic of the holoellipsometer realizing the method and employing the Michelson interferometer with phase modulation of the radiation.

About the authors

M Ali

Bauman Moscow State Technical University

Email: MochmedAli2206@jmail.com
Bauman Moscow State Technical University

Yu Yu Kachurin

Bauman Moscow State Technical University

Email: caich@mail.ru
Bauman Moscow State Technical University

A P Kiryanov

Scientific and Technological Center for Unique Instrumentation of RAS

Scientific and Technological Center for Unique Instrumentation of RAS

T A Ryjova

People's Friendship University of Russia

Российский университет дружбы народов; People's Friendship University of Russia

I P Shapkarin

Moscow State University of Design and Technology

Moscow State University of Design and Technology

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Copyright (c) 2012 Али М., Качурин Ю.Ю., Кирьянов А.П., Рыжова Т.А., Шапкарин И.П.

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This work is licensed under a Creative Commons Attribution 4.0 International License.

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