Light-Diode Holoellipsometer with Binary Modulation of Polarization Employing Light Scattering from Uniaxial Bi-Dimension Crystal

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  • Authors: Ali M1, Kiryanov AP2, Kovalev VI3, Kvasha IV4
  • Affiliations:
    1. Bauman Moscow State Technical University
    2. Scientific and Technological Center for Unique Instrumentation of RAS
    3. Department of the Kotelnikov Institute of Electronics and Radiotechniques of RAS
    4. People‘s Friendship University of Russia
  • Issue: No 2 (2013)
  • Pages: 201-209
  • Section: Articles
  • URL: http://journals.rudn.ru/miph/article/view/8544
  • Cite item

Abstract


A holoellipsometer with binary modulation of polarization employing almost normal light scattering by the sample representing itself an optically uniaxial crystal is presented. The device is actual for the tomometric tools which are widely used in nanotechnologies and medicine. The main equations of the holoellipsometry employing normal light scattering method are obtained.

About the authors

M Ali

Bauman Moscow State Technical University

Email: mohammedali2206@gmail.com

A P Kiryanov

Scientific and Technological Center for Unique Instrumentation of RAS

Email: kiryanov37@mail.ru

V I Kovalev

Department of the Kotelnikov Institute of Electronics and Radiotechniques of RAS

Email: ellipsometry@yandex.ru

I V Kvasha

People‘s Friendship University of Russia

Experimental Physics Department

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Copyright (c) 2013 Али М., Кирьянов А.П., Ковалёв В.И., Кваша И.В.

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This work is licensed under a Creative Commons Attribution 4.0 International License.

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